全自动晶圆减薄机

本设备主要用于研磨Si、Ge、GaAs、InP、SiC、GaN、ZnO、LiTaO3、石英玻璃、金刚石等半导体材料。

<p><strong>主要用途：</strong></p> <p>本设备主要用于研磨Si、Ge、GaAs、InP、SiC、GaN、ZnO、LiTaO3、石英玻璃、金刚石等半导体材料</p> <p><strong>设备特点</strong><strong>：</strong></p> <p>1、该系列设备是我司自主设计制造的全自动晶圆研磨机,技术成熟,性能稳定,可完全替代进口品牌。</p> <p>2、先进的处理系统和设计特点有助于实现高产量高良率。</p> <p>3、标配接觸式在線测厚。也可选配非接觸式NCG(非接触)。</p> <p>4、采用LCD触摸屏图形用户界面，使操作和维护更加直观和简单。</p> <p>5、突破核心技术封锁,自研大功率静压气浮主轴,承载平台。</p> <p>6、采用大理石基座,大理石气浮转台,极大提高了设备的整体稳定性。</p> <p>7、可研磨3至12英寸的各种晶圆。</p> <p><strong>主要技术参数：</strong></p> <p>型号&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;200A&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;300A</p> <p>晶圆尺寸&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 4",6",8"&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 8",12"</p> <p>研磨方式&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;In-feed grinding with wafer Rotation&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; In-feed grinding with wafer Rotation</p> <p>研磨轮&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;钻石轮&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;钻石轮</p> <p>额定功率&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 7.5kw&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;11KW</p> <p>额定转速&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 1000-7000&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 1000-4000</p> <p>TTV&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &le;2um&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &le;3um</p> <p>表面粗糙度&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;可根据客户要求调整&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 可根据客户要求调整</p> <p>厚度测量精度&nbsp; &nbsp; &nbsp; &nbsp; 1um&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;1um</p> <p>外形尺寸(WxDxH)&nbsp; 2500x4500x1800mm&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;2500x4500x1800mm</p> <p>总重量&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;大约4000kg&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;大约5000kg</p> <p><strong>&nbsp;</strong></p>