双轴减薄机

各类晶圆、硅、锗、砷化镓、磷化铟、碳化硅、氮化镓、氮化铝、氧化镓、锑化镓、锑化铟、碲锌镉、铌酸锂、钽酸锂、金刚石。

<p><strong>主要用途：</strong></p> <p>各类晶圆、硅、锗、砷化镓、磷化铟、碳化硅、氮化镓、氮化铝、氧化镓、锑化镓、锑化铟、碲锌镉、铌酸锂、钽酸锂、金刚石。</p> <p><strong>设备结构及特点：</strong></p> <p>1、本机主要由机座、床身、真空吸盘、吸盘主轴、砂轮主轴、砂轮进给机构、好的控制系统、运动控制系统。</p> <p>2、设备采用左右两组精磨砂轮主轴 ，可在同一个节拍实现粗磨和精磨。</p> <p>3、采用两个10寸金刚石砂轮，砂轮粒度可根据产品需求选择。</p> <p>4、吸盘主轴通过精密丝杆导轨及伺服马达驱动左右移动来实现粗磨和精磨。</p> <p>5、真空吸盘根据产品需求定制。</p> <p>6、砂轮进给机构采用上银精密丝杆、导轨、三菱伺服马达配合驱动砂轮主轴来实现精磨磨削。</p> <p>7、本机采用在非接触在线测量仪 ，目的是适时对产品的厚度进行测量。</p> <p>8、控制系统采用三菱PLC、伺服马达 、触摸屏等。</p> <p>特点：设备可以同时实现粗磨与精磨，采用精磨丝杆导轨模组搭载真空吸盘主轴来回切换粗磨与精磨位置，同时具备产品厚度控制功能。</p> <p><strong>主要技术参数：</strong></p> <p>真空吸盘尺寸&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;300mm</p> <p>真空吸盘数量&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;1个</p> <p>吸盘转速&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 0-300rpm/min</p> <p>吸盘电机功率&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;2KW</p> <p>磨轮马达功率&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;5.5KW</p> <p>磨轮尺寸&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;10寸</p> <p>研磨方式&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;粗磨 精磨</p> <p>磨轮转速&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;0-3000rpm/min</p> <p>厚度控制精度&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 0.003mm</p> <p>厚度控制范围&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 0.2-10mm</p> <p>光栅尺分辨率&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &le;0.1um</p> <p>磨轮重复定位精度&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;1um</p> <p>磨轮最小设定步距&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 0.1um/s</p> <p>电源电压&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 3相380V</p> <p>设备尺寸&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;1700*1300*2170</p> <p>设备重量&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;1800KG</p> <p>&nbsp;</p>