铜抛机

本设备主要用于蓝宝石衬底、蓝宝石外延片、硅片、陶瓷片、石英晶体、碳化硅、锗片以及其他半导体材料的单面精密研磨。

<p><strong>应用范围</strong><strong>：</strong></p> <p>本设备主要用于蓝宝石衬底、蓝宝石外延片、硅片、陶瓷片、石英晶体、碳化硅、锗片以及其他半导体材料的单面精密研磨。</p> <p><strong>设备原理及特点：</strong></p> <p>1、本设备为单面精密研磨设备,采用先进的机械结构和多种先进控制方法,研磨加工效率高，运行稳定。</p> <p>2、整机采用PLC 触摸屏控制系统,设备参数设置和操作简单方便,系统运行稳定性高。</p> <p>3、主电机采用变频调速控制,实现主机软启动、软停机，降低设备运行冲击,减少工件损伤。</p> <p>4、工件研磨压力采用气缸加压方式,通过电气比例阀控制实现压力的闭环控制,保证极高的施压精度与稳定性。</p> <p>5、上压盘采用主动驱动方式,在确保产品研磨速率的前提下保证各工位研磨加工的统一性。</p> <p>6、研磨盘与上压盘都设置了冷却水冷却功能,在保证研磨液发挥最大效率的同时减少研磨盘面的变形。</p> <p>7、设备自带盘面修整机,盘面修整后可保证0.01mm的盘面平整度。</p> <p><strong>主要技术参数：</strong></p> <p>型号&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;FD-7104XA&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;FD-8104XA&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; FD-9104XA</p> <p>磨盘规格&nbsp; &nbsp; &nbsp; &nbsp; &nbsp;700x250x12mm&nbsp; &nbsp; &nbsp; &nbsp; 810x255x12mm&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;910x250x12mm</p> <p>陶瓷盘直径&nbsp; &nbsp; &nbsp; 240~260mm&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 305mm&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;360mm</p> <p>主电机功率&nbsp; &nbsp; &nbsp; 5.5KW/380V&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;7.5KW/380V&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 7.5KW/380V</p> <p>压盘电机功率&nbsp; &nbsp;0.4KW/380Vx4&nbsp; &nbsp; &nbsp; &nbsp; &nbsp;0.4KW/380Vx4&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;0.4KW/380Vx4</p> <p>修整电机功率&nbsp; &nbsp; 0.2KW/380V&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 0.2KW/380V&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;0.2KW/380V</p> <p>主电机转速&nbsp; &nbsp; &nbsp; 10-100rpm(max)&nbsp; &nbsp; &nbsp; &nbsp;5-90rpm(max)&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 5-90rpm(max)</p> <p>设备工位数&nbsp; &nbsp; &nbsp;4个&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 4个&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp;4个</p> <p>修盘方式&nbsp; &nbsp; &nbsp; &nbsp;自动修盘机&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 自动修盘机&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 自动修盘机</p> <p>设备规格&nbsp; &nbsp; &nbsp; &nbsp;1050x1950x2300mm&nbsp; &nbsp; 1200x2200x2500mm&nbsp; &nbsp;1200x1800x2300mm</p> <p>设备重量&nbsp; &nbsp; &nbsp; &nbsp; 2100KG&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 2350KG&nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; &nbsp; 2500KG</p> <p><strong>&nbsp;</strong></p>